Hot sale MKS ENI RF Generator Spectrum 11002-00 (p.n 0130-2221) 11kW 1.8-2.17MHZ Good condition and ready to use, Industrial grade high power RF plasma generator that produces 11 kW (11,000 Watt) output power in the 1.8 to 2.17 MHz frequency range. This technology is widely used in semiconductor manufacturing, particularly in Applied Materials (AMAT) processing equipment.
MKS ENI Spectrum 11002-00 (Part Number: 0130-2221) Specifications & Features
- Output Power: 11,000 W (11 kW)
- Frequency Range: 1.8 MHz – 2.17 MHz (centered around ~2 MHz)
- Primary Applications: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and plasma etching.
- Input AC Power: 200–208 VAC, 3-Phase, 50/60 Hz.
- Tuning Technology: Features integrated automatic frequency tuning to maximize power transfer without requiring complex external matching networks.
- Physical Weight: Approximately 56.8 kg (125 lbs)
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