For sale MKS B-5002 PN B-5002-03 Good condition and ready to use, These units are used in industrial semiconductor manufacturing equipment, especially in systems manufactured by Applied Materials (AMAT).
MKS B-5002 PN B-5002-03 Specifications
- Device Type: Radio Frequency (RF) Plasma Generator
- Model: Spectrum B-5002
- Part Number: B-5002-03
- Power Output: 5000 Watts (5 kW) maximum power
- Frequency Range: 1.8 MHz to 2.17 MHz (commonly calibrated around 1.98 MHz depending on the exact sub-variant)
- AC Input Requirements: 200–208 VAC, 3-Phase, 50/60 Hz
Primary Applications
This generator delivers the steady, highly controlled RF power required to strike and sustain plasma in critical semiconductor fabrication processes, including:
- Chemical Vapor Deposition (CVD)
- Physical Vapor Deposition (PVD)
- Plasma etching and chamber cleaning steps
linda lohan –
Very precise frequency accuracy. Low noise floor, wide dynamic range. Measurement results comply with lab standards. Highly recommended.