Hot Sale used condition with affordable price MKS ENI B-10513 SPECTRUM 10513-00 10.5kW 13.56MHz APPLIED MATERIALS 0190-17877 RF GENERATOR AMAT
MKS ENI B-10513 SPECTRUM 10513-00 10.5kW 13.56MHz AMAT 0190-17877 RF GENERATOR Specifics
- Manufacturer: MKS Instruments / ENI Power Systems
- Model Line: Spectrum Series (Model B-10513)
- OEM Customer: Applied Materials (AMAT)
- AMAT Part Number: 0190-17877
- MKS Part Number: 10513-00
- Power Output: 10.5 kW (10,500 Watts)
- Operating Frequency: 13.56 MHz (Standard industrial ISM band)Â
Primary Application
This unit is designed to provide high-stability radio frequency power to generate and sustain plasma inside vacuum chambers. It is typically integrated into AMAT Semiconductor Processing Tools for processes such as:
- Plasma-Enhanced Chemical Vapor Deposition (PECVD)
- Physical Vapor Deposition (PVD / Sputtering)
- Reactive Ion Etching (RIE)
Ryan Arron –
Thank you for your service, highly recommended, I will shop again. The package was received in good condition.