Up For Sale Inficon Modul1000 Leak Detector w BOC Edwards XDS5 Dry Scroll Dry Pump Good Condition and Ready to use, A compact, modular helium leak detector designed for industrial integration. When paired with a BOC Edwards XDS5 dry scroll pump, it creates a highly sensitive, oil-free vacuum leak detection system ideal for semiconductor manufacturing and testing of hermetically sealed components.
- Modul1000 Detector Core:
- Smallest Detectable Leak Rate: < 5 × 10⁻¹² mbar l/s
- Max. Inlet Pressure: 0.4 mbar
- Helium Pumping Speed: 2.5 l/s at inlet
- Interfaces: Features plug-and-play installation with flexible PLC, PC, or remote control
- Calibration: Uses I⋅ CAL (Intelligent Calculation Algorithm) software for fast, accurate response times across all ranges.
- Edwards XDS5 Foreline Pump:
- Type: Oil-free, hermetically sealed dry scroll pump.
- Benefit: Eliminates hydrocarbon backstreaming, protecting your test environment and parts from oil contamination.
- Integration: Easily connects directly to the system’s fore-vacuum port (often via DN 25 KF) to act as the primary roughing and backing pump for the Modul1000.






















Every Grace –
Super user-friendly. I didn’t even need to read the manual to figure it out. Super fast delivery, thank you.